微机电系统（英语：Micro-Electro-Mechanical System，缩写为MEMS）是基于微电子技术，关键尺寸在亚微米到亚毫米范围，将传感、信号处理和执行器融为一体的微器件与系统。随着微机电系统（MEMS）的发展和与其他学科的交叉与融合，出现了多个研究分支，如RF-MEMS、BIO-MEMS、MOEMS、惯性MEMS、NEMS等。今后MEMS的发展也必将越来越向一些极端环境推进，这也为MEMS的发展提供了机遇和挑战。

研究领域

研究方向一：

生物医学微系统。面向人体健康，在生物相容和微尺度的极端环境下对微型医疗器械需要，开展可植入/可穿戴柔性MEMS和微流控的研究，并与匹配电路相集成，建立生物医学微系统。

研究方向二：

极端环境微传感器与系统：面向航空发动机、ITER等极端环境下对微传感器需要，研究超高温传感器、深低温传感器、高温压力传感器和自供能传感器等，开展传感器匹配电路的集成设计，建立应用于极端环境监测的集成微系统。

研究方向三：

微纳制造与精密制靶：针对国家重大需要和国际前沿需求，开展相关的极端环境下的微纳制造研究。重点研究曲面微纳制造新工艺和新装备，并开展在超高温和高压条件下微型靶的制造研究。

专利

1. 刘景全；王龙飞；彭慧玲；杨春生；杨斌;柔性生理干电极及其制备方法;专利号：ZL 201210228067.1.

2. 刘景全；吴婷婷；张川；江水东；杨斌；杨春生;中子半影成像的编码孔径的制备方法;专利号：ZL 201210422073.0.

3. 刘景全；康晓洋；田鸿昌；杨春生;一种电极点间距可调整的微电极阵列;专利号：ZL 201110428383.9.

4. 刘景全；康晓洋；田鸿昌；杨斌；朱红英#；杨春生;由激活循环控制电化学性质的氧化铱微电极的制备方法;专利号：ZL 201310190510.5.

5. 刘景全；张川；吴婷婷；杨斌；杨春生;基于压电材料的水下生物机器鱼系统供能装置;专利号：ZL 201210422306.7.

6. 刘景全；康晓洋；田鸿昌；杨斌；朱红英#；杨春生;反应溅射氧化铱修饰的微电极阵列及其制备方法;专利号：ZL 201310190253.5.

7. 刘景全；江水东；杨春生;柔性电阻式MEMS温度传感器阵列及其制备方法;专利号：ZL 201310326700.5.

8. 刘景全；彭慧玲；杨斌；陈翔；杨春生;一种用于脑电测量的准干电极及其制备方法;专利号：ZL 201410025481.1.

9. 刘景全；唐龙军；杨斌；陈翔；杨春生;基于柔性MEMS传感器的智能压力导丝及传感器制备方法;专利号：ZL 201310753944.1.

论文

1. PDMS-Based Low Cost Flexible Dry Electrode for Long-Term EEG Measurement.Wang, L.F.; Liu, J. Q.*; Yang, B.; Yang, C. S..IEEE Sensors Journal,2012.

2. Parylene-based implantable platinum-black coated wire microelectrode for orbicularis oculi muscle electrical stimulation.Rui, Y. F.; Liu, J. Q.*; Yang, B.; Li, K. Y.; Yang, C. S..Biomedical Microdevices,2012.

3. Fabrication and analysis of high-performance piezoelectric MEMS generators.Tang, G.; Liu, J. Q.*; Yang, B.; Luo, J.B.; Liu, H. S.;Li,Y.G., Yang, C. S.; Dao V.D.; Tanaka, K.; Sugiyama, S..Journal of Micromechanics and Microengineering,2012.

4. Modeling and Experimental Study of a Low-Frequency-Vibration-Based Power Generator Using ZnO Nanowire Arrays.Yang, B.; Lee ,C.K.; Ho, G. W.; Ong, W. L., Liu, J. Q.; Yang, C. S..Journal of Microelectromechanical System,2012.

5. Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever.Tang, G.; Liu, J. Q.*; Yang, B.; Luo, J.B.; Liu, H. S.;Li,Y.G., Yang, C. S.; Dao V.D.; Tanaka, K.; Sugiyama, S..IEE Electronics Letters,2012.

6. Tapered metal microneedles fabricated by the hybrid process of mechanical dicing and electrochemical corrosion for drug delivery.Yan, X. X.; Liu, J. Q.*; Jiang Shuidong. ; Yang, B., Yang C. S..Micro & Nano Letters,2012.

7. Hollow metallic microneedles fabricated by combining bulk silicon micromachining and UV–LIGA technology.Yan, X. X.; Liu, J. Q.*; Shen X. C. ; Yang, C. S..Microsystem Technology,2012.

8. Microfabrication of cooling arm for fusion energy source application.Jiang, S. D., Liu, J. Q., Yang, B., Zhu, H. Y., & Yang, C. S..Micro & Nano Letters,2013.

9. Fabrication and testing of porous Ti microneedles for drug delivery.Yan, X. X., Liu, J. Q., Jiang, S. D., Yang, B., & Yang, C. S..Micro & Nano Letters,2013.

10. Design, microfabrication and measurement of cooling arm for fusion energy source application.Jiang, S. D., Liu, J. Q., Yang, B., Zhu, H. Y., & Yang, C. S..Micro & Nano Letters,2013.

11. Fabrication and testing analysis of tapered silicon microneedles for drug delivery applications.Yan, X. X., Liu, J. Q., Jiang, S. D., Yang, B., & Yang, C. S..Microelectronic Engineering,2013.

12. Platinum Resistance Microsensor for Cryogenic Temperature Measurement.Mei, J. B., Liu, J. Q., Jiang, S. D., Yang, B., & Yang, C. S..Key Engineering Materials,2013.

13. MEMS-based flexible capacitive electrode for ECG measurement.Wang, L. F., Liu, J. Q., Peng, H. L., Yang, B., Zhu, H. Y., & Yang, C. S..Electronics Letters,2013.

14. Fabrication and characterization of biologically inspired curved-surface artificial compound eyes.Qing He, Jingquan Liu, Bin Yang,Yunzhao Dong and Chunsheng Yang.IEEE Journal of Microelectromechanical Systems,2013.

15. Optimized fabrication of micropipette using laser micromachining process and application in functional electrical stimulation of muscle tissue.Lingyun Zhang, Jingquan Liu, Bin Yang, Xiaoyang Kang, Shuidong Jiang, Jiabing Mei, Chunsheng Yang.Microelectronic Engineering,2013.

16. A MEMS-based pyramid micro-needle electrode for long-term EEG measurement.Long-Fei Wang, Jingquan Liu, Xiaoxiao Yan, Bin Yang, Chun-Sheng Yang.Microsystem Technology,2013.

17. Mechanical and electrical stability of parylene-based platinum-black coated wire microelectrode for implantableapplications.Yue-Feng Rui, Jing-Quan Liu • Bin Yang, Chun-Sheng Yang, Dai-Xu Wei.Journal of Applied Electrochemistry,2013.

18. Implantable electrode array with platinum black coating for brain stimulation in fish.Zhang, C., Liu, J. Q., Tian, H. C., Kang, X. Y., Du, J. C., Rui, Y. F., Yang, C. S..Microsystem Technologies,2014.

19. High performance PZT thick films based on bonding techniques for d31 mode harvester with integrated proof mass.Yang B., Zhu Y. B., Wang X. Z., Liu J. Q., Chen X., Yang C.S..Sensors and Actuators A: Physical,2014.

20. Graphene oxide doped conducting polymer nanocomposite film for electrode-tissue interface.Tian, H. C., Liu, J. Q., Wei, D. X., Kang, X. Y., Zhang, C., Du, J. C., Yang, C. S..Biomaterials,2014.

21. Microfabrication of thin film temperature sensor for cryogenic measurement.Jiang S. D., Liu J., Q., Yang B., Zhu H. Y., Yang C. S..Microsystem Technologies,2014.

22. Optimization and electrochemical characterization of RF-sputtered iridium oxide microelectrodes for electrical stimulation.Kang, X., Liu, J., Tian, H., Yang, B., NuLi, Y., & Yang, C..Journal of Micromechanics and Microengineering,2014.

23. Development of high performance piezoelectric d33 mode MEMS vibration energy harvester based on PMN-PT single crystal thick film.Tang, G., Yang, B., Liu, J. Q., Xu, B., Zhu, H. Y., & Yang, C. S..Sensors and Actuators A: Physical,2014.

24. Controlled activation of iridium film for AIROF microelectrodes.X. Kang,Jingquan Liu, H. Tian, C. Zhang, B. Yang, Y. NuLi, et al..Sensors and Actuators B: Chemical,2014.

25. Flexible dry electrode based on carbon nanotube/polymer hybrid micropillars for biopotential recording.Peng, Hui-Ling; Liu, Jing-Quan; Tian, Hong-Chang; Xu, Bin; Dong, Yun-Zhao; Yang, Bin; Chen, Xiang; Yang, Chun-Sheng.Sensors and Actuators, A: Physical,2015.

26. Electrical transport property of zirconium oxynitride thin film deposited by magnetron sputtering process.Zhan, Guanghui; Liu, Jingquan; Guo, Jie; Feng, Jie; Xu, Bin; Yang, Bin; Chen, Xiang; Yang, Chunsheng.Journal of Materials Science: Materials in Electronics,2015.

27. Flexible multi-channel microelectrode with fluidic paths for intramuscular stimulation and recording.Tian, Hong-Chang; Liu, Jing-Quan; Kang, Xiao-Yang; He, Qing; Yang, Bin; Chen, Xiang; Yang, Chun-Sheng.Sensors and Actuators, A: Physical,2015.

28. An integrated flexible harvester coupled triboelectric and piezoelectric mechanisms using PDMS/MWCNT and PVDF.Zhu, Yanbo; Yang, Bin; Liu, Jingquan; Wang, Xingzhao; Chen, Xiang; Yang, Chunsheng.Journal of Microelectromechanical Systems,2015.

29. Low-voltage transient/biodegradable transistors based on free-standing sodium alginate membranes.Guo, Jie; Liu, Jingquan; Yang, Bin; Zhan, Guanghui; Kang, Xiaoyang; Tian, Hongchang; Tang, Longjun; Chen, Xiang; Yang, Chunsheng.IEEE Electron Device Letters,2015.

30. Fabrication and characterization of a dry electrode integrated Gecko-inspired dry adhesive medical patch for long-term ECG measurement.Wang, Long-Fei ; Liu, Jing-Quan; Yang, Bin; Chen, Xiang; Yang, Chun-Sheng.Microsystem Technologies,2015.

31. Self-closed parylene cuff electrode for peripheral nerve recording.Kang, Xiaoyang ; Liu, Jing-Quan; Tian, Hongchang; Yang, Bin; Nuli, Yanna; Yang, Chunsheng.Journal of Microelectromechanical Systems,2015.

32. Development of an atmospheric pressure air microplasma jet for the selective etching of parylene-C film.Guo, Honglei ; Liu, Jingquan; Wang, Zhaoyu; Wang, Xingzhao; Chen, Xiang; Yang, Bin; Yang, Chunsheng.Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),,2015.

33. A novel transdermal power transfer device for the application of implantable microsystems.Liu, Jing-Quan; Rui, Yue-Feng; Kang, Xiao-Yang; Yang, Bin; Chen, Xiang; Yang, Chun-Sheng.Micromachines,2015.

34. Biodegradable Junctionless Transistors With Extremely Simple Structure.Jie Guo; Jingquan Liu; Bin Yang.IEEE Electron Device Letters,2015.

35. Flexible triboelectric and piezoelectric coupling nanogenerator based on electrospinning P(VDF-TRFE) nanowires.Xingzhao Wang; Bin Yang; Jingquan Liu.2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, 18-22 Jan. 2015,2015.

36. Localized etching of polymer films using an atmospheric pressure air microplasma jet.Honglei Guo; Jingquan Liu; Bin Yang.Journal of Micromechanics and Microengineering,2015.

37. Selective removal of parylene-C film by ultrafine Ar/O2 atmospheric pressure plasma jet.Guo, Honglei; Liu, Jingquan; Chen, Xiang; Yang, Bin; Yang, Chunsheng.Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams,2015.